Supported partly by Semi Conduct or Research Corporation contract number 89-SJ-108


Selective Epitaxial Growth (SEG) of silicon has shown great potential for advanced integrated circuit technologies. Before SEG can be fully utilized, sidewall defects must be reduced or at least controlled. The phenomena responsible for these defects were not understood, therefore more quantification of the sidewall defects is necessary. Walled diodes have been used to measure the sidewall leakage currents, but are susceptible to problems which make them poor devices for comparing different sidewall interfaces. A new device structure, the Sidewall Gate Controlled Diode (SGCD), is presented for the quantification of the defects near the SEG sidewall. The SGCD is shown to have advantages over the use of walled diodes despite the complex fabrication process required to build it. The development of the fabrication process for this device and the verification of its useful operation are presented. After the operation of the SGCD was verified, the device was used to evaluate the effects of various SEG deposition parameters on the sidewall defect density. This study determined that lower temperature, slower growth rate depositions followed with an in-situ hydrogen anneal generally reduced the defect density. Inconsistencies in the results also indicated that the profile of the sidewall may also influence the defect density at the SEG/oxide sidewall.

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