In this paper, we study gas breakdown in micro/nanogaps at atmospheric pressure from low RF to high millimeter band. For gaps larger than about 10 lm, the breakdown voltage agrees with macroscale vacuum experiments, exhibiting a sharp decrease at a critical frequency, due to transition between the boundary- and diffusion-controlled regimes, and a gradual increase at very high frequencies as a result of inefficient energy transfer by field. For sub-micron gaps, a much lower breakdown is obtained almost independent of frequency because of the dominance of field emission


Copyright (2013) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in (A. Semnani, A. Venkattraman*, A. Alexeenko, D. Peroulis, “Frequency Response of Atmospheric Pressure Gas Breakdown in Micro/Nanogaps”, Applied Physics Letters,103, 063102, 4 pages, 2013.) and may be found at (http://dx.doi.org/10.1063/1.4817978). The following article has been submitted to/accepted by [Applied Physics Letters]. After it is published, it will be found at (http://dx.doi.org/10.1063/1.4817978). Copyright (2013) A. Semnani, A. Venkattraman*, A. Alexeenko, D. Peroulis. This article is distributed under a Creative Commons Attribution 3.0 Unported License.

Date of this Version




Included in

Engineering Commons