Abstract

In this paper we present, for the ¯rst time, an experimentally-extracted model for the spring con- stant and tuning range of an analog RF-MEMS var- actor that includes viscoelastic e®ects in RF-MEMS devices. By utilizing a bi-state bias condition with one state lasting 60 minutes and the other 1 minute, this model focuses on capturing the true electrome- chanical behavior of the varactor. An experimental setup with very high long-term accuracy is created to measure capacitance of the varactor up to 1,370 hours. The impact of these e®ects and the e®ective- ness of the model are demonstrated on a tunable- resonator loaded with RF-MEMS varactors.

Date of this Version

1-2010