Spectroscopy of a Deterministic Single-Donor Device in Silicon

M. Fuechsle, University of New South Wales
J. A. Miwa, University of New South Wales
S. Mahapatra, University of New South Wales
H. Ryu, Network for Computational Nanotechnology, Purdue University
S. Lee, Network for Computational Nanotechnology, Purdue University
O. Warschkow, University of Sydney
L. C. L. Hollenberg, University of Melbourne
G. Klimeck, Network for Computational Nanotechnology, Purdue University
M. Y. Simmons, University of New South Wales

Date of this Version

5-1-2012

Comments

Proceedings of SPIE, V8400, Article Number: 840006, May 1, 2012

doi: 10.1117/12.919763

Abstract

We present a single electron transistor (SET) based on an individual phosphorus dopant atom in an epitaxial silicon environment. Using scanning tunneling microscope (STM) hydrogen lithography, the single impurity is deterministically placed with a spatial accuracy of ±1 lattice site within a donor-based transport device. Low temperature transport measurements confirm the presence of the single donor and show that the donor charge state can be precisely controlled via gate voltages. We observe a charging energy that is remarkably similar to the value expected for isolated P donors in bulk silicon, which is in sharp contrast to previous experiments on single-dopant transport devices. We show that atomistic modeling can fully capture the effects of the highly-doped transport electrodes on the electronic states of the donor, thus highlighting the high level of control over the electrostatic device properties afforded by a deterministic single donor architecture. Our fabrication method therefore opens the door for the realization of a scalable donor-based qubit architecture in silicon.

Discipline(s)

Nanoscience and Nanotechnology

 

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