A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface

Teimour Maleki, Purdue University, Birck Nanotechnology Center
Girish Chitnis, Purdue University, Birck Nanotechnology Center
Albert Kim, Purdue University, Birck Nanotechnology Center
Babak Ziaie, Purdue University, Birck Nanotechnology Center

Date of this Version

8-2012

Citation

DOI: 10.1109/JMEMS.2012.2192909

Abstract

In this paper, we report on the first laser-micromachined batch-fabricated single-layer elastomeric actuator with a corrugated surface profile. The structural material of the cantilever actuator is a single [polydimethylsiloxane (PDMS)] layer, and electrodes are soft lithographically patterned conductive carbon grease. The asymmetric corrugated surface provides a bending moment in a single PDMS layer without the need for a second inactive layer. An actuator which is 5 mm long, 1 mm wide, and 80 mu m thick can generate up to 2-mm out-of-plane displacement with zero applied force and 15 mu N at zero deflection while consuming 20 mu W of static power when actuated with 500 V.

Discipline(s)

Nanoscience and Nanotechnology

 

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