In-place fabrication of nanowire electrode arrays for vertical nanoelectronics on Si substrates
Aaron D. Franklin, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University
Matthew R. Maschmann, Birck Nanotechnology Center and School of Mechanical Engineering, Purdue University
Manuel DaSilva, Birck Nanotechnology Center and School of Materials Engineering, Purdue University
David B. Janes, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University
Timothy Fisher, Birck Nanotechnology Center and School of Mechanical Engineering, Purdue University
Timothy D. Sands, Birck Nanotechnology Center, School of Electrical and Computer Engineering, and School of Materials Engineering, Purdue University
Date of this Version
March 2007 Citation
J. Vac. Sci. Techno. B 25(2), Mar/Apr 2007
This document has been peer-reviewed.
Abstract
Vertical arrays of Pd nanowire electrodes with controllable and reproducible diameters and lengths are fabricated using a porous anodic alumina
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