Power Handling Capability of High-Q Evanescent-mode RF MEMS Resonators with Flexible Diaphragm

Xiaoguang Liu, Purdue University - Main Campus
Linda Katehi, School of Electrical and Computer Engineering, Purdue University
William J. Chappell, School of Electrical and Computer Engineering, Birck Nanotechnology Center, Purdue University
Dimitrios Peroulis, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University

Abstract

In this paper, we present theoretical and experimental investigations into the power handling capability of high-Q evanescent-mode RF MEMS tunable resonators based on electrostatically-actuated thin diaphragm tuner. The "self-biasing" of the diaphragm tuner from RF signal has been found to cause non-linear effects such as resonant frequency drift, frequency response distortion and instability. A non-linear circuit model has been proposed to predict such non-linearities and provide design guidelines for high power applications. Large signal measurement on a high-Q evanescent-mode resonator with no DC biasing shows good agreement with theoretical predictions.

Discipline(s)

Engineering | Nanoscience and Nanotechnology