Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope

Hung Chang, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University,
Samir Iqbal, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University
E A. Stach, Birck Nanotechnology Center and School of Materials Engineering, Purdue University
Alexander H. King, Birck Nanotechnology Center and School of Materials Engineering, Purdue University
Nestor J. Zaluzec, Electron Microscopy, Materials Sciences, Division, Argonne National Laboratory
Rashid Bashir, Birck Nanotechnology Center, School of Electrical and Computer Engineering, Weldon School of Biomedical Engineering, School of Mechanical Engineering, Purdue University

Abstract

The fabrication of solid-state nanopores using the electron beam of a transmission electron microscope