Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS

Dimitra Psychogiou, Swiss Federal Institute of Technology Zurich
Yunjia Li, Swiss Federal Institute of Technology Zurich
Jan Hesselbarth, University of Stuttgart
Stephane Kuehne, Swiss Federal Institute of Technology Zurich
Dimitrios Peroulis, Birck Nanotechnology Center, Purdue University
Christofer Hierold, Swiss Federal Institute of Technology Zurich
Christian Hafner, Swiss Federal Institute of Technology Zurich

Date of this Version

3-2013

Citation

Psychogiou, D., Li, Y., Hesselbarth, J., Kühne, S., Peroulis, D., Hierold, C. and Hafner, C. (2013), Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS. Microw. Opt. Technol. Lett., 55: 465–468.

Abstract

A continuously variable transmission type W-band phase shifter based on a single pole bandpass filter tuned by MEMS actuated fingers is reported. Tuning is achieved by means of two half-wavelength long conductive fingers that synchronously rotate upwards in an antiparallel fashion. The fingers deflection results in a distributed variable shunt capacitance which in turn leads to a variable analog phase shift. For an applied DC bias voltage between 0 and 26 V, the transmission phase can be continuously varied up to 46.4 degrees at a frequency of 106 GHz with an insertion loss of less than 3.4 dB. (C) 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:465468, 2013; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.27390

Discipline(s)

Nanoscience and Nanotechnology

 

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