Direct fabrication of microelectrodes on a polymer substrate using selective ultrashort pulsed laser ablation of inkjet-printed Ag lines

S. H. Lee, Hanyang University
D. J. Lee, Hanyang University
C. K. Lee, Hanyang University
Y. H. Lee, Hanyang University
Steven T. Wereley, Birck Nanotechnology Center, Purdue University
J. H. Oh, Hanyang University

Abstract

An inkjet-based ultrashort pulsed laser patterning on a polymer substrate is presented with high-laser scanning speeds. The effects of the laser processing parameters on the ablation characteristics were studied to accomplish damage-free laser ablation. Laser ablation characteristics depend on input energy, scanning speed, and number of scans. Final width of micro-electrodes can be flexibly controlled by multiple selective ablations. Well-defined, uniform microelectrodes without damaging their microstructure, and the underlying polymer substrate are demonstrated via a direct pattering process combining inkjet printing with ultrashort pulsed laser ablation. These microelectrodes exhibit little influence of thermal effect of laser ablation, resulting in little variation in their electrical performances.

Discipline(s)

Nanoscience and Nanotechnology