Title

Optimization of Surface Orientation for High-Performance, Low-Power and Robust FinFET SRAM

Date of this Version

February 2006

Abstract

We analyze the impact of surface orientation on stability and performance of FinFET SRAMs. We show that devices with proper orientations can improve static noise margin (SNM, 23-35%) and access time (22-33%) of 32nm FinFET SRAM compared to a design with devices of single (110) orientation.