"Thin Silicon Membranes for Micromechanical Accelerometers Using Select" by G. W. Neudeck, J. Pak et al.

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ECE Technical Reports

Title

Thin Silicon Membranes for Micromechanical Accelerometers Using Selective Epitaxial Growth Techniques

Authors

G. W. Neudeck, Purdue University, School of Electrical Engineering
J. Pak, Purdue University, School of Electrical Engineering
A. Kabir, Purdue University, School of Electrical Engineering
J. Chang, Purdue University, School of Electrical Engineering
J. Hancock, Purdue University, School of Electrical Engineering

Abstract

No abstract.

Date of this Version

February 1992

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