Integration and applications of fluorocarbon phase change liquids (FPCL) with MEMS and microfluidics
Abstract
Advances in polymeric microfabrication and hybrid integration technologies have enabled the miniaturization of sensing and actuation systems with a simultaneous increase in their functionality and performance. In addition, incorporation of "smart" materials into such platforms has led to further improvements in applications where energy source and power supply is limited. In this thesis, I describe design, fabrication, and characterization of several MEMS and microfluidic devices in which fluorocarbon liquids (FCLs) are introduced/integrated as a smart material in order to enhance their functionalities in terms of energy harvesting, improved transduction sensitivity, and mechanical/fluidic performance. The first device is a capacitive transducer in which integrated fluorocarbon containing chambers lead to a 42.5% increase in sensitivity. Furthermore, by using the same device as the basic module for capacitive energy harvesting, one can increase the energy gained per conversion cycle by 42.3%. The second device is a transdermal micropump/drug dispenser which operates exclusively through the evaporation of the FCL induced by body heat, attaining 28.8 &mgr;L/min flow rate and 28.9 kPa of backpressure. Finally, I present a thermoelectric power generator in which a FCL of low boiling point (34 °C) is used to increase the body-heat-contact harvested energy through evaporative cooling by 226% compared to a control device encapsulated in air.
Degree
Ph.D.
Advisors
Ziaie, Purdue University.
Subject Area
Electrical engineering
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