Molecular sensors for MEMS
Abstract
Molecular sensors, known as pressure-sensitive paint and temperature-sensitive paint, are applied inside MEMS devices to obtain the internal and external flow fields. The spatial resolution for the PSP and TSP measurements has improved to 5 μm. The low-pressure PSP sensor has been investigated for use in MEMS measurements, with an application range from continuum flow to transition flow. PSP and TSP measurements in different micro devices have been obtained with the flow fields covering steady and unsteady, subsonic and supersonic flow. In microchannel measurements, the pressure distributions inside the microchannel have been obtained for Knudsen number from 0.006 to 0.8. Compressibility and rarefaction effects can be observed in the PSP data. Detailed information at the channel inlet was also collected to discuss the entrance effect for different flow regimes. For micronozzle experiments, four different micronozzles have been fabricated to study geometry effects at the micro scale. The pressure maps inside the micronozzle devices have been obtained with PSP sensors. A modified schlieren technique is used to compare the PSP results and investigate the shock wave behavior at high- and low-pressure conditions. Thick viscous layers in the micronozzle have been observed in the low-pressure measurements. For microjet impingements, heat transfer measurements have been collected with different microjet devices by using TSP sensors. For supersonic impinging microjet measurements, both pressure and temperature data have been obtained at different pressure ratios, impingement angles and impingement distances. Measurements reveal that the magnitude and number of shock cells decreases in the micro scale due to strong viscous effects. For microturbine measurements, averaged results of PSP and TSP measurements have been obtained for a rotation speed from 1300 to 4000 rpm. Phase-averaged results have been collected by using a laser triggering system at rotation speed of 1400 rpm. The feasibility of molecular sensors in MEMS measurements has been demonstrated in this work. The difference of physical phenomena at macro and micro scale have been compared and discussed. The PSP and TSP results measured in micro devices are valuable information for future MEMS research.
Degree
Ph.D.
Advisors
Sullivan, Purdue University.
Subject Area
Aerospace materials
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