A piezoelectrically actuated titanium micropump for drug delivery
Abstract
A miniature, titanium micropump for drug delivery with average flowrate of 120 µL/min, outlet (head) pressure of 0.2 psi, and low power consumption (50-90 mW) was designed, fabricated by DRIE anisotropic etching, and tested (i.e. measurement of pump output characteristics, flow rate, backpressure, and power consumption). Titanium was used as the substrate for the micropump due to its bio-compatibility, high fracture toughness (60 times that of silicon) and fatigue resistance. The micropump consists of three major components: 1) a piezo-electrically actuated membrane capable of generating large flowrates independent of the back pressure, 2) titanium flap valves, and 3) a cylindrical cavity for reduced dead volume. The materials employed in the micropump are well-suited for drug delivery applications and compatible with common sterilization methods, and they suffer minimal degradation of properties or performance under such treatments.
Degree
M.S.E.C.E.
Advisors
Ziaie, Purdue University.
Subject Area
Biomedical engineering|Pharmacy sciences
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